PE2-5.1 MEMS & Microsystems: Introduction
You can define MEMS and microsystems and distinguish them from microelectronics, explain the benefits of miniaturisation, and state MEMS design considerations, advantages and applications.
MEMS is microelectronics fabrication turned to making machines rather than only circuits, and the multidisciplinary claim is real — you need mechanics, materials and electronics at once. Miniaturisation pays for specific reasons worth naming: less material, batch fabrication at wafer scale, faster response from lower mass, and integration with the electronics that read the device. The applications list is the honest evidence: accelerometers, pressure sensors and inkjet heads are shipped in billions.
Work through these
Introduction to MEMS
What the field is: mechanical structures made with the methods of chip fabrication. Holding that definition makes the rest of the subject coherent.
Microsystems and microelectronics: the distinction
How this differs from ordinary microelectronics, which is that something physically moves. It is a small sentence with large consequences for fabrication and packaging.
Multidisciplinary nature of MEMS
Why this subject borrows from mechanics, materials, electronics and chemistry at once. It explains why the syllabus looks as scattered as it does.
Miniaturisation and its benefits
What making things smaller actually buys: speed, sensitivity, cost per unit and the ability to put many on one die. Stating the benefits keeps the technique choices grounded.
MEMS design considerations
What has to be thought about that does not arise in ordinary chip design. Stiction and residual stress are the two that ruin first attempts.
Advantages of MEMS technology
The case for the technology, gathered in one place. Read it against the design considerations above rather than on its own.
Applications of MEMS
Where it is actually used, which is more places than most people realise. Every phone contains several of these devices.
Sign in to keep your progress.
Free resources
We haven't checked most of these for screen reader use yet.
Links last checked 30 Aug 2026.
Stuck here?
Ask a mentor. A real person answers, and they can see exactly which topic you're on. Usually within a couple of working days.
Checking your session…
Topics shown in module order.