Module PE2-5
MEMS
Machines at the scale of the chip: why miniaturisation pays, the materials and substrates, the microfabrication and micromachining processes and packaging, microsystem design, and the sensors and actuators that result.
5 topics ~44 h estimated learning time
Comes after—
Unlocks—
Sign in to keep your progress.
Ready to start
- PE2-5.1 MEMS & Microsystems: Introduction
Core · 8 h
- PE2-5.2 Materials for MEMS
Core · 8 h
- PE2-5.3 Microfabrication & Packaging
Core · 10 h
- PE2-5.4 Microsystems Design
Core · 9 h
- PE2-5.5 MEMS-Based Sensors & Actuators
Core · 9 h